发明名称 EXPOSURE DEVICE FOR PROCESS
摘要 PURPOSE:To improve the size accuracy and the workability of an exposure device and to miniaturize it by disposing a container provided with a flexible film which is used for housing liquid on its bottom part to the upper part than the transparent plate of a housing so that it is freely elevated and lowered. CONSTITUTION:The container 9 which is provided with the flexible film 8 housing the liquid 7 on its bottom part to the upper part than the transparent plate 4 is arranged and formed so that it is freely elevated and lowered. Therefore, when a positive type or a negative type film 2 and a screen plate 3 coated with a photosensitive material are pressed by gradually lowering the container 9, the central part of the flexible film 8 housing the liquid starts to press the screen plate 3 from the central part thereof. Besides, the contact part of the flexible film can gradually expands and presses all over the area of the screen plate. Thus, since air is not enfolded in the part covered with the flexible film and there is not a physical effect on the material of the plate, the size accuracy can be secured. Besides, since the flexible film housing the liquid only presses the screen plate from the back surface side thereof, the exposure device is comparatively miniaturized.
申请公布号 JPH03238457(A) 申请公布日期 1991.10.24
申请号 JP19900035446 申请日期 1990.02.16
申请人 MURAKAMI SCREEN KK 发明人 MIYASAKA HIROSHI
分类号 G03F7/12;G03B27/32;G03F7/20 主分类号 G03F7/12
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