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发明名称
DIFFRACTION OPTICAL ELEMENT AND OPTICAL AXIS ADJUSTING DEVICE THEREFOR
摘要
申请公布号
JPH10339805(A)
申请公布日期
1998.12.22
申请号
JP19970165068
申请日期
1997.06.06
申请人
CANON INC
发明人
MURAKAMI EIICHI
分类号
G01M11/00;G02B5/18;G02B7/00;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G02B5/18
主分类号
G01M11/00
代理机构
代理人
主权项
地址
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