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发明名称
METHOD FOR MANUFACTURING DEPOSITED TUNNELING OXIDE
摘要
申请公布号
KR0165856(B1)
申请公布日期
1999.02.01
申请号
KR19900070109
申请日期
1990.01.16
申请人
XICOR. INC.
发明人
VASCHE, GREGORY S.
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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