NEUTRAL BEAM GRID STRUCTURE

摘要

A neutral beam grid structure is provided to facilitate a micro-patterning process by maintaining a straightness of a neutral beam. An ion beam from an ion beam source(100) passes through a grid(200), which is located behind an ion source. Plural slits(300) are normally formed in a vertical direction on a surface of the grid. The slits are formed to be in a bar-like oval shape. A ratio of a diameter of the slit with respect to a hole size of the ion beam source lies between 1:0.3 and 1:0.5, such that a mechanical strength of the grid is increased. The number of slits formed on the grid is determined according to a grid size and a spacing between the grids.