| 摘要 |
PURPOSE:To obtain the analyzed data of chemical and physical characteristics of a prescribed area on the surface of a solid substance by simultaneously and overlappedly iradiating single prescribed area on the surface of the sample with exciting continuous wave beams for exciting the surface of a sample and beams for discharging electrons from the surface of the sample. CONSTITUTION:An argon ion laser 2 is driven by an argon ion power supply 4, continuously oscillated and radiates continuous laser beams to a color element laser 3. The laser 3 pumped by the laser beams radiates continuous laser beams 5, which are led to the analyzing position X of the sample through a mirror 6. On other hand, a high voltage is impressed from a power supply 8 to an X-ray beam generator 9 and X rays 10 are projected from the generator 9 and similarly led into the analyzing position X of the sample. Discharged electrons are detected by an X-ray photoelectric spectroscopic analyzer 7 and the detected signal is analyzed by the analyzer 7. |
