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发明名称
Controlled epitaxial crystal growth by focusing electromagnetic radiation
摘要
申请公布号
US3200018(A)
申请公布日期
1965.08.10
申请号
US19620169204
申请日期
1962.01.29
申请人
HUGHES AIRCRAFT COMPANY
发明人
GROSSMAN JACK J.
分类号
C23C16/48;H01L21/20;H01L23/29
主分类号
C23C16/48
代理机构
代理人
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地址
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