| 摘要 |
PURPOSE:To form a superconducting coil having high critical current density by orienting the crystal of an oxide superconductor film as a coil material to a C axis. CONSTITUTION:A mold is manufactured previously so that a drum-shaped substrate 1 has a protruding section. A holder 2 for the substrate is formed in a columnar shape, and a heater is buried previously into the inside. A rolling mechanism is installed so that a film is homogenized, and turned during film formation. The film is formed by using an excimer laser 3 such as ArF and KrF. YBa2Cu3Oy ceramics are employed as a target 4. N2O is used as an atmospheric gas. Laser power density is brought to 5J/cm<2> (1shot), and the film is formed for several hrs. The film having C-axis orientation vertical to the surface of the drum-shaped substrate is obtained. A boundary section is dry- etched by an Nd-YAG laser, etc. Superconductivity is acquired through As-depo, but crystallizability is improved through post annealing treatment in an oxygen atmosphere. |
