PRODUCTION OF OPTICAL INTEGRATED CIRCUIT

摘要

PURPOSE:To obtain a satisfactory taper shape for a light receiving means by utilizing films different from each other in etching rate. CONSTITUTION:A bird's beak formed at the time of thermal oxidation is utilized as a taper shape in the conventional method but a satisfactory taper shape cannot be obtd. by such a means. When a taper shape 44 is formed by utilizing a film different from a part forming the taper shape 44 in etching rate, the taper shape 44 is formed in proportion to difference in etching time produced in accordance with the etching of the film. The required taper shape 44 can be formed with high reproducibility and guided light can efficiently be received.