| 摘要 |
PURPOSE:To treat a sample stably by measuring viscosity before an applying liquid is fed to the surface of the sample and controlling the number of revolution of a driving source for a base plate by a control signal corresponding to the viscosity. CONSTITUTION:A resist pump 102 expands or contracts when an air cylinder 101 is moved vertically. When the cylinder 101 is operated downward, the pump 102 contracts, and a resist is discharged through a discharge port 112. The resist is forwarded into an internal hollow pipe 113, and a falling ball 114 at a point A is pushed up and moved up to a point B. When the pump 102 completely contracts, the falling ball 114 falls by gravity, beams from a light-emitting instrument 115a to a point C are interrupted, a phototransistor 116a detects the interruption of the beams, and an output signal 118 is outputted. An output signal 117 is also transmitted similarly at a point D, viscosity eta is computed by a processor 119, and an output signal 120 is transmitted over a driving source controller at the next step. A motor 109 is controlled by a driving-source control signal 122. |
