| 摘要 |
PURPOSE:To obtain an information detector of electrostatic capacity system where the width of an electrode can be measured and confirmed after a stylus base body is attached, by specifying the gap between the front end of a stylus holding tool and the electrode. CONSTITUTION:This information detector of electrostatic capacity system consists of a stylus base body 1 having an electrode 2, a stylus holding tool 7 having a hole where the stylus base body 1 is inserted and held, and an object lens 8 of a microscope. For example, when the electrode width of an effective electrode part which is formed on the electrode 2 by polishing is confirmed with 1,000 magnifications, a gap (a) between the electrode 2 and the object lens 8 is about 0.3mm.. Therefore, a gap (e) between the electrode 2 and the front end part of the stylus holding tool 7 is set to <=0.25mm. in consideration of the range where focuses for 100 magnifications and 1,000 magnifications coincide with each other, namely, the difference or object depth to avoid contacting between the stylus holding tool 7 and the object lens 8, and the electrode width can be confirmed. |
