| 摘要 |
<p>PURPOSE:To reduce a necessary area at the joint of a plurality of photoelectric conversion elements provided in series connection on a photo transmitting insulation substrate and thus simplify the process by using laser scribing method. CONSTITUTION:The first photo transmitting conductive film 2 is formed on the photo transmitting insulation substrate 1, and the first open groove 13 is formed by cutting and isolating this conductive film 2 to a plurality of segments by using a laser light. A non single crystal semiconductor layer 3 having a P-I-N or a P-N junction is formed thereon, and the second open groove 18 is formed by cutting and isolating this layer 3 and the conductive film 2 on the lower side thereof to a plurality of segments by a laser light. Further, the second conductive film 4 is formed on the surface thereof, and the third open groove 20 is formed by cutting and isolating this conductive film 4 or this and the layer 3 on the lower side thereof, resulting in the constitution of a plurality of photoelectric conversion elements each other connected in series.</p> |
