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发明名称
ELECTRODE MATERIAL FOR PLASMA
摘要
申请公布号
JPH03239153(A)
申请公布日期
1991.10.24
申请号
JP19890329460
申请日期
1989.12.21
申请人
TOSOH CORP
发明人
KATO MASATOSHI
分类号
C30B1/02;C22C27/06;C30B29/02;H02K44/10
主分类号
C30B1/02
代理机构
代理人
主权项
地址
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