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发明名称
pH Adjusted nonionic surfactant containing alkaline cleaner composition for cleaning microelectronics substrates.
摘要
申请公布号
EP0678571(A3)
申请公布日期
1997.01.15
申请号
EP19950105743
申请日期
1995.04.18
申请人
J.T. BAKER INC.
发明人
ILARDI, JOSEPH M.;SCHWARTZKOPF, GEORGE,;DAILEY, GARY G.
分类号
C11D10/02;C11D1/66;C11D3/02;C11D3/30;H01L21/304;H01L21/306;H01L21/308;(IPC1-7):C11D3/30;C11D3/20;C11D1/74;C11D1/72
主分类号
C11D10/02
代理机构
代理人
主权项
地址
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