| 摘要 |
PROBLEM TO BE SOLVED: To simply and accurately teach a wafer carrying robot in a wafer processor having no position correcting means for the wafer position and robot hand. SOLUTION: A transmission type sensor mounted on a leg of the system at a position passing a camera center line is utilized for positioning the image- pickup point. Scale boards are provided for quantitatively numerically checking the determined focus position of the camera, leg setting position of the system and optimum lighting position. After determining the positions the readings of the scale boards are recorded to thereby record the numerals at important positions used for the image pickup at that time. Thus it is possible to surely establish the re-check and reproduction of the conditions for a short time. |
