发明名称 Method of manufacturing an SRAM with increased resistance length
摘要 A silicon nitride layer on a ground wire is used for an etching stopping layer so as to form a trench, after which a high-resistance load element is formed so as to extend the length of the resistance by the amount of the step of the trench, and by forming the high-resistance load element in two layers, the resistance length is made large.
申请公布号 US6150228(A) 申请公布日期 2000.11.21
申请号 US19980084701 申请日期 1998.05.26
申请人 NEC CORPORATION 发明人 HORIBA, SHINICHI
分类号 H01L21/311;H01L21/768;H01L21/822;H01L21/8244;H01L27/04;H01L27/11;(IPC1-7):H01L21/20;H01L21/824 主分类号 H01L21/311
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