| 摘要 |
A silicon crystallizing apparatus and method are provided to check a defective portion of a mask before a crystallization process by performing previously a mask inspecting process using a mask inspecting unit. A silicon crystallizing apparatus comprises a stage(60) for loading stably a substrate with an amorphous silicon layer, a light source for generating a laser beam, a mask(10) for a crystallized pattern of the amorphous silicon layer, an optical unit(40) for irradiating the laser beam of the light source onto the amorphous silicon layer of the substrate through the mask, and a mask inspecting unit. The mask inspecting unit(20) is used for performing a particle checking process on the mask.
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