| 摘要 |
FIELD: physics; measurements. ^ SUBSTANCE: invention pertains to measuring techniques, in particular to micro-electromechanical converters. The silicon micro-electromechanical converter consists of a thin square membrane and a piezo-frame with piezoresistpors on a bridge circuit. The piezo-frame is monolithic with a trapezoid cross-section and is fixed to the membrane through its wide base through a layer of glass. The axes of symmetry of the membrane and the piezo-frame precisely coincide. The longer sides of the piezo-frame are close to the longitudinal axis of symmetry in the transverse direction. The length L of the piezo-frame is less than the linear dimension of the membrane by a value of 0.2...4.5 (H-h) ctggamma, where H is the height of the silicon crystal with the membrane, h is the thickness of the membrane, gamma is the angle, formed by crystallographic planes {100} and {111} with anisotropic chemical etching of the single-crystal silicon. ^ EFFECT: increase in long lasting stability of the converter characteristics, increased strain sensitivity of the micro-mechanical converter, wider range of operation temperatures. ^ 2 dwg |
