发明名称 Method for chip package
摘要 Provided is a method for chip packaging, including the steps of: providing a semi-packaged wafer which has a cutting trail and a metal bonding pad of the chip; forming on the metal bonding pad a sub-ball metal electrode, using a selective formation process; forming a protective layer on the wafer in a region not including the sub-ball metal electrode, with the protective layer covering the cutting trail; forming a solder ball on the sub-ball metal electrode; dicing the wafer along the cutting trail. The present invention can prevent metal in the cutting trail from being affected during the production of the sub-ball metal electrode, and protect the lateral sides of a discrete chip after cutting. The process flow thereof is simple, and enhances the efficiency of the packaging as well as its yield.
申请公布号 US9362173(B2) 申请公布日期 2016.06.07
申请号 US201113883399 申请日期 2011.10.18
申请人 Nantong Fujitsu Microelectronics Co., Ltd. 发明人 Shi Lei;Tao Yujuan;Gao Guohua;Masuda Naomi;Meguro Koichi
分类号 H01L21/78;H01L21/56;H01L23/31;H01L23/00 主分类号 H01L21/78
代理机构 Faegre Baker Daniels LLP 代理人 Faegre Baker Daniels LLP
主权项 1. A method for chip package, comprising: providing a semi-packaged wafer, the semi-packaged wafer having a dicing street and a metal pad; selectively forming a metal electrode on the metal pad; forming a protective layer in area outside the metal electrode on the wafer, the protective layer covering the dicing street, where the protective layer is made of a cured thermosetting epoxy resin comprising a solidified filler which has a particle diameter less than one third of the thickness of the thermosetting epoxy resin before the thermosetting epoxy resin is cured, and wherein the solidified filler has a particle diameter greater than one third of the thickness of the thermosetting epoxy resin after the thermosetting epoxy resin is cured, and wherein the solidified filler is silica solid particles; forming a solder ball on the metal electrode; and dicing the wafer along the dicing street.
地址 Nantong, Jiangsu CN