发明名称 Verfahren zum Aufbringen einer Materialschicht gleichmaessiger Dicke auf eine unebene Oberflaeche
摘要 Surface and source of coating material are placed in non-reactive atmosphere and source is heated to evaporation temp. Pressure is maintained at Torr value = 1/5 (0.01.-0.50) (where s " the distance in cm. between source and surface). Uniform layer is obtained without using a number of sources, which process is only suitable for thicker layers.
申请公布号 DE1920148(A1) 申请公布日期 1969.11.20
申请号 DE19691920148 申请日期 1969.04.21
申请人 MOTOROLA INC. 发明人 RICHIE BLACK,JAMES
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
主权项
地址