发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To enable wiring resistance to be reduced and a memory cell area to be reduced by placing a conductive film which fixes a source potential of a MOS transistor for drive at a reference potential on an upper part than the MOS transistor after covering an entire surface of the memory cell. CONSTITUTION:MOS transistors for driving an n channel T1 and T2 and MOS transistors T3 and T4 for transferring the n channel are formed within a p-type well 24 which is formed within an n-type silicon substrate 23. A connection hole 14c is opened on a high-concentration n-type impurities region 12c which becomes a common source of the MOS transistors T1 and T2. A second-layer conductive film 15c for fixing a source potential of all MOS transistors for drive within the memory cell is connected to the region 12c through the connection hole 14c, thus enabling a memory cell area to be reduced while reducing resistance of wiring resistor of the conductive film for fixing the source potential to the reference potential.
申请公布号 JPH04162668(A) 申请公布日期 1992.06.08
申请号 JP19900287058 申请日期 1990.10.26
申请人 HITACHI LTD;HITACHI VLSI ENG CORP 发明人 YAMANAKA TOSHIAKI;HASEGAWA NORIO;TANAKA TOSHIHIKO;HASHIMOTO KOJI;ISHIBASHI KOICHIRO;HASHIMOTO NAOTAKA;SHIMIZU AKIHIRO;SUGAWARA YASUHIRO;KURE TOKUO;IIJIMA SHINPEI;NISHIDA TAKASHI;TAKEDA EIJI
分类号 G03F1/29;G03F1/30;G03F1/68;H01L21/027;H01L21/8244;H01L27/11 主分类号 G03F1/29
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