REAKTIVE IONENAETZUNG VON HALBLEITERN UND METALLEN,申请号DE19762617483-传众专利搜索

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发明名称	REAKTIVE IONENAETZUNG VON HALBLEITERN UND METALLEN
摘要
申请公布号	DE2617483(A1)	申请公布日期	1976.12.09
申请号	DE19762617483	申请日期	1976.04.22
申请人	INTERNATIONAL BUSINESS MACHINES CORP.	发明人	MATTHEW HARVILCHUCK,JOSEPH;SKINNER LOGAN,JOSEPH;CLIFFORD METZGER,WILLIAM;MARTIN SCHAIBLE,PAUL;RISEMAN,JACOB;COGIN SCHWARTZ,GERALDINE
分类号	C23F4/00;H01L21/3065;H01L21/32;H01L21/3213;(IPC1-7):H05K3/08;C23C15/00	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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