| 摘要 |
PURPOSE:To shorten the positioning time of a sample table supported by plural displacement type actuators by determining the position and attitude of the sample table by diving the displacement type actuators simultaneously. CONSTITUTION:A stage 11 is made of a uniform material and its center of gravity G is located in the center of the stage 11. Piezoelectric elements 1-6 are fitted with elastic hinges at both ends. The piezoelectric element 1 has its one end connected to the flank of the stage 11 on the center line in an (x) direction and also has the other end fixed. The piezoelectric element 2 has one end connected to the stage 11 on a flat plate at a constant distance from the (y)-directional center line and has the other end fixed. The piezoelectric element 3 is arranged symmetrically with the piezoelectric element 2 about the (y)-directional center line and the (x)- and (y)-directional translation and (z)-axial rotation of the stage becomes possible by the piezoelectric elements 1-3. Further, piezoelectric elements 4, 5, and 6 are arranged to put the stage 1 in motion with a six degree of freedom while the translation and rotation are combined. |
