| 摘要 |
<p>PURPOSE:To regulate the adhered carbon amount by additionally adhering amorphous carbon when the insert loss of the amorphous carbon in the part of the contact surface with a helix is smaller than a determined value, and converging the light of a light source by a lens to irradiate the excessive amorphous carbon in oxidizing atmosphere when the loss is larger than the determined value. CONSTITUTION:A support rod 4 is inserted into a heater coil 12 disposed in a chamber 11, the chamber 11 is vacuumed, and hydrocarbon gas is introduced into the chamber. The hydrocarbon gas of low pressure is heated by the heater coil 12 and thermally decomposed to adhere amorphous carbon on the surface of the support rod 4. Then, the insert loss of the adhered carbon is measured by use of a microwave measuring instrument. When the adhered amount is less than a determined amount, the amorphous carbon is additionally adhered, and when the adhered amount is larger than the determined amount, the chamber 11 is laid in oxidizing atmosphere, the light of a light source 17 using YAG laser is converged by a lens 16 followed by irradiation, whereby the excessive amorphous carbon is combusted. Thus, the adhered amount, or the thickness of the carbon film can be regulated, and an attenuating body having a determined thickness can be easily obtained.</p> |
