| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle attaching apparatus which can favorably avoid deposition of foreign matters on a reticle and which can reduce the manufacture cost with a simple structure, and to provide the pellicle and a method for attaching the pellicle. <P>SOLUTION: The pellicle attaching apparatus 20 is used to attach a pellicle 10 having a feed filter 13 where gas transmits to a reticle, and the apparatus 20 has an air feeding mechanism to feed air to the inside of the pellicle 1 through the feed filter 13. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
