COMBINED SENSOR AND METHOD FOR PRODUCING THE SAME

摘要

A combined sensor and a method for producing the same are provided to simultaneously detect angular velocity applied around a shaft in the thickness direction of substrate and acceleration applied to a surface of the substrate by crossing vibration directions of two sets of vibrating units. A combined sensor detects acceleration applied to two shafts on a horizontal plane of a substrate and an angular velocity applied around a shaft perpendicular to the two shafts. The combined sensor includes at least four vibrators(1a) supported on the substrate in a state of being vibrated in or out of the substrate. Each of the four vibrators includes at least two vibrating units having vibrating directions intersecting each other, and a pair of detecting units disposed to face the vibrating directions of the respective vibrators. The respective vibrators are independently supported on the substrate to avoid interference therebetween. The combined sensor further includes a common vibrating device to vibrate the vibrators.