| 摘要 |
An acoustic wave device, a resonator, and a filter are provided to improve a TCF(Temperature Coefficient of Frequency) by forming a first dielectric film to cover an electrode finger of an comb-like electrode. An acoustic wave device includes an electrode(12) which is of copper and formed on a piezoelectric material(10), such as LiNbO3 and LiTaO3. Reflectors are formed at both sides of an acoustic wave from a comb-like electrode pair. The comb-like electrode includes plural fingers. A first dielectric film is made of an SiO4 film which coats the electrode. A third dielectric film(16) which is made of an AlO3 film, is used for coating the first dielectric film(14). The first dielectric film contains a pore(20a) which is attached to an upper surface of the electrode.
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