Anti-electrostatic substrate cassette

摘要

The present invention provides an anti-electrostatic cassette, which mainly comprises at least an electrostatic discharge (ESD) device connected electrically to the carrying frames, which are disposed in the substrate cassette and carry the substrates, and to the handles, which are disposed on the outer sides of the substrate cassette, for forming the conductive path. By means of the contact between the equipment and the two handles of the substrate cassette, the residual static charges on the substrates are conducted to the ground for reducing the residual static charges on the substrates. Consequently, the ESD phenomena in the substrates due to friction can be avoided and hence preventing the damages in the substrates caused by static charges.

主权项

1. An anti-electrostatic substrate cassette, comprising:
a case, having a left sidewall and a right sidewall; two carrying frames, disposed on said left sidewall and said right sidewall, respectively, located in said case, and supporting at least a substrate; two handles, disposed on said left sidewall and said right sidewall, respectively, and located outside said case; and at least a first electrostatic discharge device, embedded in said left sidewall or said right sidewall and exposed to one of said handles, contacting and connected directly with one of said carrying frames, for forming a first conductive path, and the static charges of said substrate conducted to a ground along said first conductive path.