| 摘要 |
<p>PURPOSE:To offer a stage incorporated with piezoelectric elements, which can flatten a semiconductor wafer or the like which is attracted by vacuum suction and move slightly the position of a material to be inspected. CONSTITUTION:A multitude of piezoelectric elements 2... are provided integrally with one another in a main body 1 of a piezoelectric stage, filmy electrode parts 5... of the these elements 2 are arranged in a piezoelectric ceramic layer 4 in the direction perpendicular to the thickness direction of the stage and each electrode part 5 is connected to an external power supply via each lead wire 6.</p> |
