| 摘要 |
PURPOSE:To eliminate divergence of the center between a hoisting wire and a crucible shaft, to prevent propagation of vibration from a winding device to a chamber side and to stabilize operation by maintaining the hoisting wire and the crucible shaft in the same center. CONSTITUTION:Since a winding device 11 is supported by a frame 10 independent of a main chamber 2 and a pull chamber 4, deformation of the main chamber 2, etc., will not propagate to the winding device 11, position correlation between the winding device 11 and a crucible shaft 7 is always maintained constant, wire 14 and the crucible shaft 7 are maintained in the same center not to cause divergence of the center so that operation is stabilized. Since the winding device 11 is connected to the pull chamber 4 through a flexible bellows 17, vibration occurring in a drive system of the winding device 11 is absorbed by the bellows 17 and propagation of vibration to the side of the pull chamber 4 is isolated. |
