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发明名称
PHOTOCHEMICAL FABRICATION PROCESS
摘要
申请公布号
CA915494(A)
申请公布日期
1972.11.28
申请号
CAD915494
申请日期
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
EDWIN R. CLARK;VIR A. DHAKA;ARNOLD PINCK
分类号
G03C5/00;G03F7/20;(IPC1-7):G03C5/00
主分类号
G03C5/00
代理机构
代理人
主权项
地址
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