发明名称 CLEAVING DEVICE FOR CRYSTAL
摘要 <p>PURPOSE:To bring a resonator surface to a clean mirror surface, and to obtain the crystal cleaving device, which can bring resonator length to fixed size, by setting up an edge floating under a balanced state at an adjacent position on a stage, which coats a crystalline substrate with a transparent thin-film, can fix the substrate under vacuum and is provided with a minutely movable mechanism in the plane and height directions and of revolution, through an edge support bar from a support base. CONSTITUTION:The crystalline substrate 11 is placed on the stage 14, and coated with the transparent thin-film 13 from the upper section of the substrate, and a ring 12 for fixing the transparent thin-film is inserted. When the degree of vacuum is kept at vacuum pressure of 10-40cmHg through a suction from a pipe 16 for evacuation, the transparent thin-film 13 is fast stuck to a stage surface, and the crystalline substrate 11 is fixed. An arm 5 is held by hands and pushed down, and the edge is brought to a section in the vicinity of the crystalline substrate while being observed by a microscope 9. A stage fixing base 17 is turned observed by the microscope 9 so that a crystal axis of the crystalline substrate 11 and the edge 10 run parallel. The stage fixing base 17 is moved so that the crystalline substrate is brought to a predetermined position. When a prescribed cleaving position is determined, the substrate can be cloven when the arm 5 is droped softly and the edge 10 is brought lightly in contact with the crystalline substrate 11.</p>
申请公布号 JPS59111342(A) 申请公布日期 1984.06.27
申请号 JP19820221405 申请日期 1982.12.16
申请人 MATSUSHITA DENKI SANGYO KK 发明人 KIMURA SOUICHI;HATADA KENZOU
分类号 H01L21/301;H01L21/78;(IPC1-7):01L21/78 主分类号 H01L21/301
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