| 摘要 |
PURPOSE:To feed an element to be fed at each micro distance in a desired direction by combining two piezoelectric elements at a minimum limit and elongating or contracting them at a predetermined timing. CONSTITUTION:A piezoelectric driving mechanism is composed of a base 1, a first piezoelectric element 2, a second piezoelectric element 3, a holding member 4 and a controller. The second piezoelectric element 3 is first contracted by the voltage control of the controller, and an element 5 to be fed is held fixedly by the holding member 4. Then, when the first piezoelectric element 2 is elongated, the element 5 to be fed is moved at a micro distance in a predetermined direction X by the elongating operation of the first piezoelectric element 2. Thereafter, the second piezoelectric element 3 is elongated to release the holding operation of the element 3 to be fed by the holding member 4. When the first piezoelectric element 2 is contracted while the second piezoelectric element 3 remains elongated to return the length to the original value, it is returned to its initial state. Then, when the similar operation is repeated, the element 5 to be fed can be sequentially moved at each micro distance in the direction X. |
