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发明名称
X-RAY SHUTTER
摘要
申请公布号
JPH02151800(A)
申请公布日期
1990.06.11
申请号
JP19880305982
申请日期
1988.12.05
申请人
NEC CORP
发明人
FUJII KIYOSHI
分类号
G21K1/04;H01L21/027;H05H13/04
主分类号
G21K1/04
代理机构
代理人
主权项
地址
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