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发明名称
METHOD FOR CONTROLLING VAPOR PRESSURE OF COMPOUND SEMICONDUCTOR AND APPARATUS THEREFOR
摘要
申请公布号
JPH0597564(A)
申请公布日期
1993.04.20
申请号
JP19910255408
申请日期
1991.10.02
申请人
SUMITOMO METAL MINING CO LTD
发明人
OKABE YOSHIHIRO;SHIMOYAMA SHINICHI
分类号
C30B11/00;C30B29/40
主分类号
C30B11/00
代理机构
代理人
主权项
地址
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