| 摘要 |
<p>PURPOSE:To provide a pattern-defect inspecting device which can make an inspection corresponding to the variation of the pattern width only by setting a resizing quantity on the hardware without giving pre-treatment. CONSTITUTION:This device is provided with a bit expanding circuit 4, which converts a reference pattern data read out from a magnetic disk 2 into a bit data, a bit map memory 5 which stores the bit data obtained in the bit expanding circuit 4, and a resizing treatment circuit 6, which reads out the bit data from the bit memory 5 and outputs this bit data after converting it into such a bit data as to represent a pattern in which the size of the pattern representing the read-out bit data is varied by a prescribed resizing quantity. In addition, the device is provided with a comparison circuit 9 in which the bit data outputted from this resizing treatment circuit 6 is compared with the image information obtained from an image information obtaining device 10.</p> |
