APPARATUS FOR FIXING SENSOR OF ETCHING FACILITIES FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An apparatus is provided to enhance a sensitivity of a sensor and reliability in manufacturing a semiconductor device by stably fixing the sensor and minimizing defects through a prevention of bad contacts of a cable. CONSTITUTION: A socket(22) fixes a sensor for counting wafers loaded to an etching facilities. A holder(24) receives the socket(22) in a force fit manner to prevent the swing of the socket(22) in which the sensor is fixed. A clamp(26) has a portion faced to the socket(22) in a r-shape to be faced with only one side of a portion in which a cable(20) of the socket(22) is mounted in order for the socket(22) forcibly fitted to the holder(24) to be fixed, to thereby stably fix the sensor and minimize defects of semiconductor devices.