| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic shielding method for a charged particle beam exposing device, which can cancel the influence of a magnetic field as a disturbance even in states wherein the device is in a complicated shape and the unevenness of an external magnetic field is large. SOLUTION: A magnetic field 4 from an electron optical lens barrel 1 and the external magnetic field 4 enter an electron optical path in the electron optical lens barrel 1 from its hole or division part. Coil sets of five stages in total are arranged nearby the hole and division. In each coil set, four circular coils 6 are arranged around the electron optical lens barrel 1. The intensity and direction of the composite magnetic field that those coil groups produce can be changed by adjusting currents supplied to the respective coils 6. The direction and intensity of the composite magnetic field, therefore, cancel those of the disturbing magnetic field and then the influence of the disturbing magnetic field can be canceled.
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