HOT PLATE AND HOT EMBOSSING NANO IMPRINTING LITHOGRAPHY APPARATUS USING ABOVE HOT PLATE

摘要

A hot plate and a hot embossing nano-imprinting lithography apparatus using the same are provided to carry out simultaneously heating and cooling function by forming heating holes and cooling holes in a body of a hot plate. A hexagonal preform(100) is provided with plural through-holes comprising cooling holes(110) and heating holes formed at regular intervals on a side of the preform in a longitudinal direction. The preform is heated or cooled by a heating member or a cooling member. The cooling holes and the heating holes are alternatively disposed. The heating member is a straight cartridge heater(121) inserted into a corresponding through-holes.