METHOD FOR PATTERNING METALLO-ORGANIC PRECURSOR FILM AND METHOD FOR PRODUCING A PATTERNED CERAMIC FILM AND FILM PRODUCTS

摘要

METHOD FOR PATTERNING METALLO-ORGANIC PRECURSOR FILM AND METHOD FOR PRODUCING A PATTERNED CERAMIC FILM AND FILM PRODUCTS A method for patterning precursor film, a product thereof, a method for preparing a patterned ceramic film and a processing workpiece. The method for patterning precursor film includes the steps of depositing a blocking layer over the precursor film, patterning the overlaid blocking layer to uncover portions of the precursor film, irradiating the patterned blocking layer and uncovered portions of the precursor film with a beam sufficiently energetic to radiation modify the full thickness of unmasked portions of the precursor film and insufficiently energetic to radiation modify portions of the precursor film covered by the blocking layer, and developing the precursor film. The blocking layer has a lesser thickness than the precursor film, but is sufficiently thick to block an irradiating beam having the minimal energy necessary to radiation modify the full thickness of the precursor layer.