| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a spacer for obtaining a spacer that has a uniform thickness, dispenses with a polishing process of both the ends, and has high height precision. <P>SOLUTION: The manufacturing method has: a plate formation process for forming a plate 50 so that the plate 50 has thickness corresponding to the length of a cylindrical body 55 with both the surfaces as the spacer; an inner-periphery hole formation process for forming a plurality of holes 52 for inner periphery corresponding to the inner periphery of the cylindrical body 55 each on a plate 50a formed in such a thickness; and an outer-periphery hole formation process for forming a plurality of holes 53 for outer periphery corresponding to the outer periphery of the cylindrical body 55 each concentrically to the hole 52 for inner periphery. The cylindrical body 55 is taken out of the plate 50a. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
