| 摘要 |
PURPOSE:To obtain a force/acceleration/magnet sensor which can achieve detection highly accurately without requiring compensation of temperature and which has an easy manufacturing process. CONSTITUTION:A perimeter portion of a disc-shaped substrate 10 with flexibility is fixed to a sensor enclosure and an operation body 50 is joined to a center portion. A three-dimensional coordinate system (X, Y, Z) is defined for a zero point O within the substrate 10 and four sets of detection elements D1-D4 are placed along the X axis. Each detection element is in sandwich structure where piezoelectric elements 21 and 23 are sandwiched by upper electrodes 31-34 and lower electrodes 41-44. When a force Fx in X-axis direction is operated on the operation body 50 according to operation of acceleration, the substrate 10 is deflected and positive or negative electric charge is generated at each electrode. Generation state of electric charge depends on direction of operated force and an amount generated electric charge depends on the size of operated force, thus enabling a component in direction of each axis of the operated force to be detected based on this electric charge generation pattern. |
