| 摘要 |
PURPOSE:To form a humidity-sensitive film excellent in humidity and moisture resistance, by applying an aqueous solution containing 6-20wt% of sodium styrenesulfonic acid to a substrate and subsequently subjecting the coating layer to crosslinking polymerization. CONSTITUTION:A comb shaped metal conductive film 2 comprising gold is formed to a highly insulating substrate 1 comprising alumina or glass by a vacuum vapor deposition method or a sputtering method. Next, sodium styrenesulfonic acid is used as a monomer and a crosslinking agent N,N'- methylene-bis-acrylamide and polyvinyl alcohol are added to said monomer while the resulting composition is dissolved in water to be applied to a substrate 1 and, thereafter, ultraviolet rays are allowed to irradiate the coating layer in a nitrogen gaseous atmosphere to form a humidity-sensitive film 3. When a current is supplied to a lead wire 4, the quantity of the current supplied between electrodes changes corresponding to the change in the resistance value of the humidity-sensitive film 3. By this method, a long life humidity-sensitive resistor element low in a resistance value and stable even in a high humidity atmosphere can be obtained. |
