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经营范围
发明名称
Plasma chamber reactor.
摘要
申请公布号
EP0492511(B1)
申请公布日期
1995.09.20
申请号
EP19910121972
申请日期
1991.12.20
申请人
THE BOC GROUP, INC.
发明人
ROSE, PETER W.;KAPLAN, STEPHEN L.
分类号
C23C16/50;H01J37/16;H01J37/32;H05H1/46;(IPC1-7):H01J37/16
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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