发明名称 VACUUM DEPOSITION
摘要 This invention is concerned with an apparatus for depositing in vacuum an epitaxial layer of lead tin tellurides. This invention achieves a constant chemistry of the deposited film by evaporating the constituents of the film from an essentially integral and isothermal source.
申请公布号 US3647197(A) 申请公布日期 1972.03.07
申请号 USD3647197 申请日期 1970.04.27
申请人 FORD MOTOR CO. 发明人 HENRY HOLLOWAY
分类号 C30B23/02;(IPC1-7):F27B14/04 主分类号 C30B23/02
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