| 摘要 |
PURPOSE:To obtain a reaction tube of sharply reduce cost as compared with an SiC tube by a method wherein a crystalline quartz sintered layer is provided at the outside circumferential part excluding a gas introducing tube and the cap part of the transparent quartz tube having at the edge part respectively the gas introducing tube and the transparent quartz cap part. CONSTITUTION:A cylinder 2 consisting of stainless steel, etc., and lower edge thereof is wrung is engaged with the outside circumference of the transparent quartz tube 1 excluding the gas introducing tube and the transparent quartz cap, and is fixed to the quartz tube 1 using chucks 3, 4. Moreover a heat generating source 6 aligned the center thereof with the tube axis arranged inside of the quartz tube 1, and high pure crystalline quartz particles 5 having grain size of about 150-250 meshes are filled up densely in the gap between the quartz tube 1 and the cylinder 2. After then the heat generating source 6 is heated to heat the quartz tube 1 and the particles 5 at the high temperature of 2,000-2,500 deg.C, the part coming in contact with the outside circumference of the quartz tube 1 is made to be molten, the part having thickness of 1-2mm. only is made as the transparent quartz layer 7, and the part surrounding the layer thereof is made as the crystalline quartz sintered layer 5. Then the chucks 3, 4 are removed, the quartz tube 1 is draw out from the cylinder 2, the heat generating source 6 is removed, and the outside circumferential part of the sintered layer 5 is polished to obtain the desired outside diameter. |
