METHOD AND APPARATUS FOR MANUFACTURING SILICON SINGLE CRYSTAL

摘要

The present invention relates to a method and apparatus for manufacturing silicon single crystals by the Czochralski method, including the steps of dividing a crucible containing molten silicon into an inner single crystal growing section (A) and an outer material feeding section (B) to allow said molten silicon to move slowly, and pulling a silicon single crystal (5) from said single crystal growing section while continuously feeding silicon starting material to said material feeding section, the improvement wherein temperatures of said material feeding section and said molten silicon are maintained higher than a melting point of silicon by at least more than 12 DEG C.