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发明名称
SAEULE ZUR ERZEUGUNG EINES FOKUSSIERTEN IONENSTRAHLS
摘要
申请公布号
DE3933317(A1)
申请公布日期
1990.05.17
申请号
DE19893933317
申请日期
1989.10.05
申请人
MICROBEAM INC., NEWBURY PARK, CALIF., US
发明人
PARKER, NORMAN WILLIAM, SUNNYVALE, CALIF., US;PRESTON, WILLIAM, THOUSANDS OAKS, CALIF., US
分类号
H01J37/252;H01J37/30;H01J37/317;H01L21/027;H01L21/265
主分类号
H01J37/252
代理机构
代理人
主权项
地址
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