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发明名称
METHOD AND APPARATUS FOR COATING A LARGE AREA UNIFORMLY
摘要
申请公布号
JPH0372066(A)
申请公布日期
1991.03.27
申请号
JP19900201578
申请日期
1990.07.31
申请人
LEYBOLD AG
发明人
TOOMASU KURUUKU;KUREEMENSU RIYUUBUZAMU;YOTSUHEN HAINTSU
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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