| 摘要 |
PROBLEM TO BE SOLVED: To provide the data processing method of a coordinate measurement device capable of surely eliminating abnormal data by dust or the like and highly accurately evaluating the shape of a measurement object, in a data processing process for evaluating the shape of the measurement object based on the coordinate data of the measurement object fetched by scanning the surface of the measurement object. SOLUTION: An error data point sequence to a logical shape provided in a sampled coordinate data point sequence is divided into several partial error data point sequences, the average value Z and standard deviationσof the error amount of all error data points present in the error data sequence are calculated for the respective partial error data sequences and the error data point provided with the error amount D for satisfying an expression|D-Z|>=Kσ(K is a positive real number) is obtained as an abnormal error data point and turned to the object of elimination. It is executed to all the partial error data point sequences, a corrected error data point sequence is obtained, a new coordinate data point sequence corrected based on it is obtained and the shape of the measurement object is evaluated.
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