发明名称 GAS FLOW JOINT AND HEAT TREATING DEVICE
摘要 <p>PURPOSE:To make efficient heat treatment by connecting a treating vessel, a gas supplying section and a gas discharge section by the gas flow joint consisting of an extensible and contractable and universally bendable tubular body made of a resistance heating material. CONSTITUTION:The gas flow joint is constituted of the extensible and contractable and universally bendable bellows-like tubular body 1 constituted of the resistance heating element. This joint is used for the gas flow joint of the heat treating device having the gas flow joint for connecting the treating vessel, the gas supplying section and/or the gas discharge section. The gas flow joint having excellent heat resistance and leakage resistance is obtd. in this way and the generation of dew condensation and unnecessary deposits is prevented. In addition, the treating gases can be smoothly passed and the efficient heat treatment is executed.</p>
申请公布号 JPH05117861(A) 申请公布日期 1993.05.14
申请号 JP19910307195 申请日期 1991.10.28
申请人 TOKYO ELECTRON SAGAMI LTD 发明人 OKASE WATARU
分类号 C23C16/44;C23C16/455;F16L11/11;F16L27/10;H01L21/205;H01L21/22 主分类号 C23C16/44
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